DMH
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- Senior Engineer
- Supervisor of Master's Candidates
- Name (Pinyin):DMH
- School/Department:材料科学与化学工程学院
- Degree:Doctoral Degree in Engineering
- Professional Title:Senior Engineer
- Status:Employed
- Teacher College:College of Material Science and Chemical Engineering
- Discipline:Materials Science and Engineering
Contact Information
- Email:
- Paper Publications
Diffusion barrier capability of Zr-Si films for copper metallization with different substrate bias voltage
Release time:2024-02-28 Hits:
- Journal:THIN SOLID FILMS
- Volume:18
- Page Number:5593-5596
- ISSN No.:0040-6090
- Translation or Not:no
- Date of Publication:2009
