Calculation of electron-beam induced displacement in thin films by using parameter-reduced formulas
Release time:2024-02-28
Hits:
- Journal:
- NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
- Page Number:
- 67-72
- ISSN No.:
- 0168-583X
- Translation or Not:
- no
- Date of Publication:
- 2017