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Calculation of electron-beam induced displacement in thin films by using parameter-reduced formulas
发布时间:2024-02-28  点击次数:

发表刊物:NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

页面范围:67-72

ISSN号:0168-583X

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发表时间:2017