Self-Calibrated Absolute Thickness Measurement of Opaque Specimen Based on Differential White Light Interferometry
Release time:2024-02-28
Hits:
- Journal:
- IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
- Volume:
- 5
- Page Number:
- 2507-2514
- ISSN No.:
- 0018-9456
- Translation or Not:
- no
- Date of Publication:
- 2020